http://www.et.tu-dresden.de/rst.htm (Institut für Regelungs- und Steuerungstheorie)

Controlling Czochralski Crystal Growth

Institut für Regelungs- und Steuerungstheorie

http://www.ikz-berlin.de (Institute of Crystal Growth)
1. Project Overview 2. Process Overview 3. Control Tasks 4. Observers
5. Pulling Velocity Control 6. Temperature Control 7. References Jobs, Student's Jobs etc.

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Project Overview

The vapour pressure controlled Czochralski (VCz) crystal growth process used for growing large diameter gallium-arsenide (GaAs) and indium-phosphide (InP) crystals with low dislocation densities is difficult to control. No satisfactory results can be achieved with conventional approaches based on linear controllers. This project proposes new control strategies which are used for growing GaAs and InP crystals of a well defined shape by the VCz method. The project is a cooperation between Institute of Crystal Growth (IKZ), Berlin, and Institut für Regelungs- und Steuerungstheorie (RST), TU Dresden. The group at RST develops and implements controllers and observers which are then applied at IKZ.
Handgrown 4'' GaAs crystal using the VCz-technique
Research Positions available ...

Contents

The presentation is organized as follows:

PROCESS OVERVIEW

In a first step a general survey of the vapour pressure controlled Czochralski crystal growth process (VCz) is given. This process was originally developed by the Institute of Crystal Growth, Berlin. It is based on research results achieved in the 70's. More ...

CONTROL TASKS

Then the main problems in control design for this process are presented. It will be seen that an appropriate selection of the variable to be controlled is a major issue. With a good choice simple mathematical models can be used for control design. More ...!

OBSERVERS

Unfortunately, it is not possible to measure all variables to be controlled. However, nonlinear observers are used for estimating unmeasured quantities, the crystal radius for instance. Ideas which are helpful for designing such observers are sketched. More ....

PULLING VELOCITY CONTROL

Estimated values are used in an exactly linearizing feedback controller which controls the pulling velocity. This control system can be used for compensating high frequency disturbances. More ....

TEMPERATURE CONTROL

Temperature is controlled by an outer loop using the heater power as control input. More ....

JOBS, STUDENT'S JOBS, ETC.

If you are interested in advanced control strategies there may be some research positions available. Students should never hesitate asking for students and diploma thesis subjects.More ....

At RST the project is run by:

Joachim Rudolph

Ph.: +49 (0)351 463 - 33 268
Barkhausenbau BAR E21

Mail: rudolph ( ) erss11.et.tu-dresden.de
Jan Winkler

Ph.: +49 (0)351 463 - 33 421
Barkhausenbau BAR E20

Mail: cwinkler ( ) rcs.urz.tu-dresden.de
Sven-Olaf Lindert

Ph.: +49 (0)351 463 - 32 163
Barkhausenbau BAR S7

Mail: lindert ( ) eatns1.et.tu-dresden.de


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Jan Winkler
Last modified: Mon Jul 1 20:04:10 2002